Lower Campus

Oxidation/Annealing Tube Furnace
Rapid Thermal Annealer (Solaris 100)
Zeiss AXIO Optical Microscope
Keyence VK -X3000 3D Surface Profiler
Keyence VHX-X1 Digital Microscope
Surface Profiler: Bruker DektakXT
Filmetrics F40 Thin Film Analyzer
Zeiss Gemini FE-SEM 360
Plasma Asher (March500)
PlasmeTherm APEX ICP-RIE Etcher Fluorine
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