Keyence VHX-X1 Digital Microscope

microscope in labThe Keyence VHX-7020, is a high-performance digital microscope system that supports a wide range of advanced features, is specifically adapted for surface inspection applications, and is suitable for diverse collection of sample types.

Key Features

  • High-Resolution Image Capture:  
    • 2048 X 1536 single frame image capture
    • 6144 X 4608 High resolution stage shifted image capture
    • Up to 100,000 (H) X 100,000(W)-pixel images image sizes can be obtained using image stitching photo / montaging capabilities.
  • Real-Time 2D / 3D Measurement: leveraging focus variation techniques allows real-time 2D /3D measurements, allowing rapid metrology analysis.
  • Mult-Angle Observation: Lens system can tilt up to 90 degrees and stage can rotate 360 degrees, allowing observation of hard to see features such treads, welds, sidewall, etc.
  • Advanced Lighting Control: Adjustable ring and coaxial lighting sources allow optimization of sample illumination for a wide range of materials and surface finishes. Transmission and reflection light paths available.  
  • Integrated Analysis Software: Software capabilities include grain size analysis, surface roughness, contamination detection, and failure analysis. 

Key Applications

  • Failure, defect and contamination analysis.
  • Quantitative analysis of polishing, etching, and coating processes.
  • Inspection of Semiconductor and MEMS devices.
  • No Contact 2D and 3D measurement of components and tolerance verification.
  • General surface analysis including particle, microcrack, surface texture and uniformity.

Digital Microscope - VHX-X1 series | KEYENCE America

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Equipment Fee

Cleanroom Service 1

Core Facility
Gertrude E. and John M. Petersen Institute of NanoScience and Engineering
Location
Lower Campus
Equipment Type
Metrology