The Gemini 360 Field Emission Scanning Electron Microscope (FE-SEM) enables high resolution surface examination and analysis. Microscope has integrated navigation camera enables rapid sample loading. This SEM has a cross-over free Zeiss Gemini 1 column and uses a low to moderate energy (0.02 to 30 keV) electron beam to image samples in high-vacuum with sub-nanometer resolution at 15 keV and 1.2 nm at 1 keV. Available detectors include In-lens SE; Everhart-Thornley detector.
Gemini 360 located in NFCF cleanroom facility for imaging of nanodevices and patterns in clean environment.
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Equipment Fee
Characterization Service 3 *
(*This characerization service is located inside cleanroom space)