The Bruker Dektak-XT is a semi-automated stylus profiler that can be used to measure step height with better than 5 Å repeatability, surface roughness, as well as 3D surface mapping.
Key Features
- Motorized X/Y stage with 6 inches of travel, motorized 360 degree rotation
- Includes 2-3, 4-6, or 8″ wafer vacuum chuck
- LIS 3, low inertia sensor with 1 to 15mg of force
- 3.1Mpixel color camera with selectable magnification
- Optically flat scan block with 55mm scan length
- Environmental enclosure to prevent against acoustic interferences
- Better than 5 Å step height repeatability, 1 σ using a 0.1 μm step size
- Stitching for up to 200 mm scans
- 3D map collection and extensive data analysis
- Automated collection capabilities with unlimited number of locations
- Soft materials mode – like PDMS and others
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Equipment Fee
Fabrication Service 1
Core Facility
Gertrude E. and John M. Petersen Institute of NanoScience and Engineering
Location
Lower Campus
Equipment Type
Metrology