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PlasmeTherm APEX ICP-RIE Etcher Chlorine
Trion Reactive Ion Etcher (RIE)
Parylene Deposition Coater
Trion Plasma Enhanced Chemical Vapor Deposition (PECVD)
Anric AT410 Atomic Layer Deposition (ALD)
Fiji 200 Plasma Enhanced Atomic Layer Deposition (PE-ALD)
Plassys E-Beam Evaporation System
Angstrom NEXDEP Sputtering System
AJA Hybrid Sputter/Evaporation System (located in Physics)
Angstrom COVAP Thermal Evaporator
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