The Plassys Electron Beam Evaporator MEB550S is a state of the art physical vapor deposition tool that uses an intense electron beam to vaporize a source material under high vacuum, offering a wide range of well-controlled deposition rates for a variety of materials.
Key Features
- 8x 15cc crucibles
- Thin film evaporation of metals with electron beam
- 10 keV electron beam energy, 10 kW power
- Substrates up to 100 mm
- Substrate rotation and tilt
- Ion gun for sample cleaning and milling
- Cryo pumped load lock and main chamber
- Substrate heating up to 850°C
- Full computer control
- Available materials: Al, Au, Ti, Ni, Cr, Co, Pt, W, Ag
Key Applications and available processes
- MEMS
- Thermal Barriers
- Transistors
- Semiconductors
- Optical devices
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Equipment Fee
Fabrication Service 2
Core Facility
Gertrude E. and John M. Petersen Institute of NanoScience and Engineering
Location
Lower Campus
Equipment Type
Thin Film Deposition