Key Features
- Four Source Thermal Evaporator
- Cr, Au, Ag, Al and other materials upon request.
- Dual Rate Monitor for Co-Depostion
Key Applications and available processes
- High Vacuum Deposition of metals and oxides
- Both multilayer and co-deposition.
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Equipment Fee
Fabrication Service 2
Core Facility
Gertrude E. and John M. Petersen Institute of NanoScience and Engineering
Location
Lower Campus
Equipment Type
Thin Film Deposition