Lower Campus

CR - ICP RIE Chlorine System PlasmaTherm APEX
CH - Parylene Deposition Coater PDS 2010
CR - Hood; Litho 3 Developing
CH - Horiba LabRAM Soleil Raman Microscope
CR - Hood; Litho 2 w/ Spinner, ebeam
CH - FIB-SEM_FEI Scios Dual Beam
CR - Hood; Litho 1 w/ Spinner, optical
CH - EPMA - Electron Microprobe
CR - Hood; Acid
CH - Ellipsometer
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