Lower Campus

CR - Mask Aligner; Quintel
CH - Sputter Coater Denton
CR - Keyence VK - X3000
CH - SEM-ZEISS Sigma500 VP
CR - Keyence VHX - X1
CH - SEM - FEI Apreo
CR - Inspection SEM - Zeiss GeminiSEM 360
CH - Plasma Cleaner_P.I.E Tergeo EM
CR - ICP RIE Fluorine System PlasmaTherm APEX
CH - PDMS Preparation Area
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