Lower Campus

CR - Thin Film Analyzer Filmetrics F40
CR - Surface Profiler DektakXT
CR - Inspection SEM - Zeiss GeminiSEM 360SEM-ZEISS Sigma500 VP
CH - XRF MALVERN EPSILON 1 XRF analyzer
CR - RTA - Solaris
CH - XRD Malvern PANAlytical Empyrean
CR - RIE - Reactive Ion Etcher
CH - XRD - Bruker D8 XRD system
CR - Plasma Asher- March PX500
CH - XPS ULVAC-PHI Genesis
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