Lower Campus

CH - SEM-ZEISS Sigma500 VP
CR - Keyence VHX - X1
CH - SEM - FEI Apreo
CR - Inspection SEM - Zeiss GeminiSEM 360
CH - Plasma Cleaner_P.I.E Tergeo EM
CR - ICP RIE Fluorine System PlasmaTherm APEX
CH - PDMS Preparation Area
CR - ICP RIE Chlorine System PlasmaTherm APEX
CH - Parylene Deposition Coater PDS 2010
CR - Hood; Litho 3 Developing
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