Lower Campus

Angstrom NEXDEP Sputtering System
AJA Hybrid Sputter/Evaporation System (located in Physics)
Angstrom COVAP Thermal Evaporator
Raynolds Hoods (Acid, Spinner, Developer)
Nanoscribe 3D Lithography System
Zeiss Axio Imager Motorized Optical Microscope
YES HMDS Oven
Mask Aligner – Quintel Q4000 MA
Heidelberg MLA150 Direct Write Lithographer
Heidelberg MLA100 Direct Write Lithographer
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