AJA Three-Chamber Deposition System

High-vacuum three chamber system for high-quality superconducting thin film growth.

It integrates:

  • Electron-beam evaporation (Sn, Al, Ti, Ta, Pd, V)
  • Sputtering deposition (NbTiN, Ta, Al2O3, Nb, Pt)
  • In situ surface preparation (H2 cleaning, plasma cleaning, and annealing)
  • In situ surface analysis (RHEED, Auger spectroscopy)

Fully interconnected chambers and in situ sample transfer ensure ultra-clean interfaces and controlled growth of multilayer superconducting thin films.

Specification Sheet (PDF)

 

machine in lab
Left Chamber

 

 

machine in lab
Center Chamber

 

machine in lab
Right Chamber

 

Core Facility
Western PA Quantum Information Core
Location
Lower Campus
Equipment Type
Thin Film Growth