ThermoFisher Scios Focused Ion Beam/Scanning Electron Microscope with EDAX EDS/EBSD 

FEI Scios Dual Beam SystemFEI Scios™ is an ultra-high-resolution analytical DualBeam™ system that delivers outstanding 2D and 3D performance for a broad range of samples, including magnetic materials. A 110 mm stage tilts up to 90˚ and provides a long, eucentric working distance for great flexibility. FEI Scios easily accommodates a wide range of sample types and data collection techniques while simultaneously allowing maximum energy dispersive X-Ray spectroscopy (EDS) signal detection at the FIB and SEM coincidence point. TEAM™ Pegasus is a world-class materials characterization solution providing users with both elemental composition and crystal structure results in one easy-to-use EDS-EBSD package. Smart Features in the TEAM™ software streamline analysis and facilitate workflow, while optimizing data quality and helping EDAX users solve their characterization problems quickly and more efficiently.

Key Features

  • Imaging Detectors: In-lens (T1, T2), CBS/ABS (Backscatter), ETD (Secondary), STEM w/ HAADF
  • FIB milling with Gallium
  • Platinum Deposition
  • Selective Carbon Mill
  • Easy-Lift Needle Manipulator for TEM lamellas
  • EDX Elemental Analysis to identify which elements are present in the sample
  • EBSD for grain orientation mapping

Key Applications and available processes

  • TEM sample preparation
  • Cross Sectioning
  • EDS/EBSD analysis
  • Nanofabrication/Patterning

Check Availability

Already have an account?

Reserve this tool with the FOM.

Equipment Fee

Characterization Service 2

Core Facility
Gertrude E. and John M. Petersen Institute of NanoScience and Engineering
Location
Lower Campus
Equipment Type
Electron Microscopy