The HORIBA UVISEL Plus Spectroscopic Ellipsometer is a unique instrument that features a photoelastic device which modulates the polarization without any mechanical movement. The phase modulation technology provides significant advantages in terms of performance and experimental versatility, such as performing advanced measurements of the degree of polarization, anisotropy and Mueller Matrix elements. When compared to conventional ellipsometers, the UVISEL Plus spectroscopic ellipsometer features high accuracy determination of the ellipsometric angles across a full range, which allows superior precision and sensitivity for transparent substrates, ultra-thin films, and films with low index contrast. It covers a wide spectral range from 190 to 2100 nm.
UVISEL Specification
- Spectral range: from 190 to 885 nm │NIR extension option up to 2100 nm
- Detection: High resolution monochromator coupled to sensitive detectors
Manual Configuration
- Spot size: 0.05 – 0.1 – 1 mm (pinhole)
- Sample stage: 150 mm, manual height (20mm) and tilt adjustment
- Goniometer: Manually adjustable angle from 55° to 90° by step of 5°
Integrated Goniometer
- Manual angle of incidence: 35° to 90° by 5° step
- Sample holder: 150mm, 20mm manual z height adjustment
- Autocollimation system for sample alignment in option
- Dimension: width: 25cm; height: 35cm; depth: 21 cm
Options
- Accessories: temperature controlled cell
Performance
- Accuracy: Ψ= 45°±0.01° and Δ=0°±0.01° measured in straight-through air configuration1.5 – 5.3 eV
- Repeatability: NIST 1000Å SiO2/Si (190-2100 nm): d ± 0.1 % – n(632.8nm) ± 0.0001
Obtained information
- Thin film thickness from 1Å to 50 µm
- Surface and interface roughness
- Optical constants (n,k) for isotropic, anisotropic and graded films
- Derived optical data such as: absorption coefficient α, optical bandgap Eg
- Material properties: compound alloy composition, porosity, crystallinity, morphology and more
- Mueller matrix
- Depolarization
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Equipment Fee
Characterization Service 1